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1

A Monolithic CMOS-MEMS 3-Axis Accelerometer With a Low-Noise, Low-Power Dual-Chopper Amplifier

Hongwei Qu,, Deyou Fang,, Huikai Xie,

Journal:

IEEE Sensors Journal

Year:

2008

Language:

english

File:

PDF, 1.85 MB

english, 2008

2

Fabrication, characterization, and analysis of a DRIE CMOS-MEMS gyroscope

Huikai Xie, Fedder, G.K.

Journal:

IEEE Sensors Journal

Year:

2003

Language:

english

File:

PDF, 1.43 MB

english, 2003

3

A low-voltage, low-current, digital-driven MEMS mirror for low-power LiDAR

Wang, Dingkang, Thomas, Lenworth, Koppal, Sanjeev, Xie, Huikai

Journal:

IEEE Sensors Letters

Year:

2020

File:

PDF, 1.87 MB

2020

4

Post-CMOS processing for high-aspect-ratio integrated silicon microstructures

Huikai Xie,, Erdmann, L., Xu Zhu,, Gabriel, K.J., Fedder, G.K.

Journal:

Journal of Microelectromechanical Systems

Year:

2002

Language:

english

File:

PDF, 436 KB

english, 2002

5

A Low-Power Low-Noise Dual-Chopper Amplifier for Capacitive CMOS-MEMS Accelerometers

Sun, Hongzhi, Fang, Deyou, Jia, Kemiao, Maarouf, Fares, Qu, Hongwei, Xie, Huikai

Journal:

IEEE Sensors Journal

Year:

2011

Language:

english

File:

PDF, 900 KB

english, 2011

6

[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - A Piezoelectric MEMS Loud Speaker Based on Ceramic PZT

Wang, Haoran, Li, Mengyuan, Yu, Yuanyuan, Chen, Zhenfang, Ding, Yingtao, Jiang, Huabei, Xie, Huikai

Year:

2019

Language:

english

File:

PDF, 458 KB

english, 2019

7

MEMS Mirrors for LiDAR: A Review

Wang, Dingkang, Watkins, Connor, Xie, Huikai

Journal:

Year:

2020

File:

PDF, 6.72 MB

2020

8

A Tip-Tilt-Piston Micromirror Array for Optical Phased Array Applications

Wu, Lei, Dooley, Sarah, Watson, Edward A., McManamon, Paul F., Xie, Huikai

Journal:

Journal of Microelectromechanical Systems

Year:

2010

Language:

english

File:

PDF, 1.93 MB

english, 2010

9

MEMS Ultrasound Transducers for Endoscopic Photoacoustic Imaging Applications

Wang, Haoran, Ma, Yifei, Yang, Hao, Jiang, Huabei, Ding, Yingtao, Xie, Huikai

Journal:

Year:

2020

File:

PDF, 14.65 MB

2020

10

A curved multimorph based electrothermal micromirror with large scan range and low drive voltage

Sagnik Pal, Huikai Xie

Journal:

Sensors and Actuators A: Physical

Year:

2011

Language:

english

File:

PDF, 921 KB

english, 2011

11

A Millimeter-Tunable-Range Microlens for Endoscopic Biomedical Imaging Applications

Lei Wu, Huikai Xie

Journal:

IEEE Journal of Quantum Electronics

Year:

2010

Language:

english

File:

PDF, 11.18 MB

english, 2010

12

MEMS mirrors based on a curved concentric electrothermal actuator

Lin Liu, Sagnik Pal, Huikai Xie

Journal:

Sensors and Actuators A: Physical

Year:

2012

Language:

english

File:

PDF, 2.30 MB

english, 2012

13

A CMOS-MEMS mirror with curled-hinge comb drives

Huikai Xie,, Yingtian Pan,, Fedder, G.K.

Journal:

Journal of Microelectromechanical Systems

Year:

2003

Language:

english

File:

PDF, 2.35 MB

english, 2003

14

Process Development for CMOS-MEMS Sensors With Robust Electrically Isolated Bulk Silicon Microstructures

Hongwei Qu,, Huikai Xie,

Journal:

Journal of Microelectromechanical Systems

Year:

2007

Language:

english

File:

PDF, 1.14 MB

english, 2007

15

High-Fill-Factor Micromirror Array With Hidden Bimorph Actuators and Tip–Tilt-Piston Capability

Jia, Kemiao, Samuelson, Sean R., Xie, Huikai

Journal:

Journal of Microelectromechanical Systems

Year:

2011

Language:

english

File:

PDF, 1.34 MB

english, 2011

16

Miniature probe integrating optical-resolution photoacoustic microscopy, optical coherence tomography, and ultrasound imaging: proof-of-concept

Dai, Xianjin, Xi, Lei, Duan, Can, Yang, Hao, Xie, Huikai, Jiang, Huabei

Journal:

Year:

2015

Language:

english

File:

PDF, 1.69 MB

english, 2015

17

A high-SPL piezoelectric MEMS loud speaker based on thin ceramic PZT

Wang, Haoran, Chen, Zhenfang, Xie, Huikai

Journal:

Sensors and Actuators A: Physical

Year:

2020

File:

PDF, 3.61 MB

2020

18

An imaging analysis and reconstruction method for multiple-micro-electro-mechanical system mirrors-based off-centre scanning optical coherence tomography probe

Fan, Yingwei, Luo, Site, Huo, Li, Liu, Yabing, Li, Xinling, Xie, Huikai, Kang, Hongxiang

Journal:

Laser Physics Letters

Year:

2020

File:

PDF, 1.39 MB

2020

19

A thermal bimorph micromirror with large bi-directional and vertical actuation

Ankur Jain, Hongwei Qu, Shane Todd, Huikai Xie

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 495 KB

english, 2005

20

A single-crystal silicon micromirror for large bi-directional 2D scanning applications

Ankur Jain, Huikai Xie

Journal:

Sensors and Actuators A: Physical

Year:

2006

Language:

english

File:

PDF, 745 KB

english, 2006

21

A large vertical displacement electrothermal bimorph microactuator with very small lateral shift

Lei Wu, Huikai Xie

Journal:

Sensors and Actuators A: Physical

Year:

2008

Language:

english

File:

PDF, 1.11 MB

english, 2008

22

A piezoelectric unimorph actuator based tip-tilt-piston micromirror with high fill factor and small tilt and lateral shift

Yiping Zhu, Wenjing Liu, Kemiao Jia, Wenjun Liao, Huikai Xie

Journal:

Sensors and Actuators A: Physical

Year:

2011

Language:

english

File:

PDF, 661 KB

english, 2011

23

Vertical comb-finger capacitive actuation and sensing for CMOS-MEMS

Huikai Xie, Gary K. Fedder

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 683 KB

english, 2002

24

Endoscopic optical coherence tomographic imaging with a CMOS-MEMS micromirror

Huikai Xie, Yingtian Pan, Gary K. Fedder

Journal:

Sensors and Actuators A: Physical

Year:

2003

Language:

english

File:

PDF, 362 KB

english, 2003

25

A CMOS-MEMS Gyroscope Interface Circuit Design With High Gain and Low Temperature Dependence

Hongzhi Sun, Kemiao Jia, Xuesong Liu, Guizhen Yan, Yu-Wen Hsu, Fox, R.M., Huikai Xie

Journal:

IEEE Sensors Journal

Year:

2011

Language:

english

File:

PDF, 1.82 MB

english, 2011

26

A Review of Phased Array Steering for Narrow-Band Electrooptical Systems

McManamon, P.F., Bos, P.J., Escuti, M.J., Heikenfeld, J., Serati, S., Huikai Xie, Watson, E.A.

Journal:

Proceedings of the IEEE

Year:

2009

Language:

english

File:

PDF, 1.50 MB

english, 2009

27

A two-axis electrothermal micromirror for endoscopic optical coherence tomography

Jain, A., Kopa, A., Yingtian Pan, Fedder, G.K., Huikai Xie

Journal:

IEEE Journal of Selected Topics in Quantum Electronics

Year:

2004

Language:

english

File:

PDF, 367 KB

english, 2004

28

Endoscopic Optical Coherence Tomography with a Modified Microelectromechanical Systems Mirror for Detection of Bladder Cancers

Xie, Tuqiang, Xie, Huikai, Fedder, Gary K., Pan, Yingtian

Journal:

Year:

2003

Language:

english

File:

PDF, 957 KB

english, 2003

29

A 2.8-mm Imaging Probe Based On a High-Fill-Factor MEMS Mirror and Wire-Bonding-Free Packaging for Endoscopic Optical Coherence Tomography

Samuelson, S. R., Lei Wu,, Jingjing Sun,, Se-woon Choe,, Sorg, B. S., Huikai Xie,

Journal:

Journal of Microelectromechanical Systems

Year:

2012

Language:

english

File:

PDF, 1.33 MB

english, 2012

30

An electrothermal microlens scanner with low-voltage large-vertical-displacement actuation

A. Jain, Huikai Xie

Journal:

IEEE Photonics Technology Letters

Year:

2005

Language:

english

File:

PDF, 409 KB

english, 2005

31

SPIE Proceedings [SPIE International Symposium on Photoelectronic Detection and Imaging 2011 - Beijing, China (Tuesday 24 May 2011)] International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies - Modeling and simulation of sea clutter for missile-borne radar

Luo, Xiaobo, Liu, Zheng, Lu, Zaiqi, Fu, Qiang, Wang, Yuelin, Xie, Huikai, Jin, Yufeng

Year:

2011

Language:

english

File:

PDF, 330 KB

english, 2011

32

A Lateral-Axis Microelectromechanical Tuning-Fork Gyroscope With Decoupled Comb Drive Operating at Atmospheric Pressure

Zhong Yang Guo,, Long Tao Lin,, Qian Cheng Zhao,, Zhen Chuan Yang,, Huikai Xie,, Gui Zhen Yan,

Journal:

Journal of Microelectromechanical Systems

Year:

2010

Language:

english

File:

PDF, 1.95 MB

english, 2010

33

A tip–tilt–piston micromirror with a double S-shaped unimorph piezoelectric actuator

Liu, Wenjing, Zhu, Yiping, Jia, Kemiao, Liao, Wenjun, Tang, Yongming, Wang, Baoping, Xie, Huikai

Journal:

Sensors and Actuators A: Physical

Year:

2013

Language:

english

File:

PDF, 1.65 MB

english, 2013

34

An Electrothermomechanical Lumped Element Model of an Electrothermal Bimorph Actuator

Todd, S.T., Huikai Xie,

Journal:

Journal of Microelectromechanical Systems

Year:

2008

Language:

english

File:

PDF, 602 KB

english, 2008

35

3-D Confocal Laser Scanning Microscopy Based on a Full-MEMS Scanning System

Liu, Lin, Xie, Huikai

Journal:

IEEE Photonics Technology Letters

Year:

2013

Language:

english

File:

PDF, 870 KB

english, 2013

36

An electromagnetically actuated micromirror with precise angle control for harsh environment optical switching applications

Tseng, Victor Farm-Guoo, Li, Jiping, Zhang, Xiaoyang, Ding, Jinling, Chen, Qiao, Xie, Huikai

Journal:

Sensors and Actuators A: Physical

Year:

2014

Language:

english

File:

PDF, 2.99 MB

english, 2014

37

Analysis and Fabrication of Curved Multimorph Transducers That Undergo Bending and Twisting

Pal, Sagnik, Xie, Huikai

Journal:

Journal of Microelectromechanical Systems

Year:

2012

Language:

english

File:

PDF, 1010 KB

english, 2012

38

[IEEE 2013 International Conference on Optical MEMS and Nanophotonics (OMN) - Kanazawa, Japan (2013.08.18-2013.08.22)] 2013 International Conference on Optical MEMS and Nanophotonics (OMN) - Design and fabrication of an electromagnetically actuated optical switch with precise tilt angle control

Tseng, Victor Farm-Guoo, Li, Jiping, Zhang, Xiaoyang, Xie, Huikai

Year:

2013

Language:

english

File:

PDF, 308 KB

english, 2013

39

A Tip-Tilt-Piston Micromirror With Symmetrical Lateral-Shift-Free Piezoelectric Actuators

Liao, Wenjun, Liu, Wenjing, Zhu, Yiping, Tang, Yongming, Wang, Baoping, Xie, Huikai

Journal:

IEEE Sensors Journal

Year:

2013

Language:

english

File:

PDF, 1008 KB

english, 2013

40

A Large Piston Displacement MEMS Mirror With Electrothermal Ladder Actuator Arrays for Ultra-Low Tilt Applications

Samuelson, Sean R., Xie, Huikai

Journal:

Journal of Microelectromechanical Systems

Year:

2014

Language:

english

File:

PDF, 2.28 MB

english, 2014

41

[IEEE 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Shanghai, China (2010.11.1-2010.11.4)] 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology - Multi-axis integrated CMOS-MEMS inertial sensors

Xie, Huikai, Sun, Hongzhi, Jia, Kemiao, Fang, Deyou, Qu, Hongwei

Year:

2010

Language:

english

File:

PDF, 456 KB

english, 2010

42

[IEEE 2010 Ninth IEEE Sensors Conference (SENSORS 2010) - Kona, HI (2010.11.1-2010.11.4)] 2010 IEEE Sensors - Two-axis scanning micromirror based on a tilt-and-lateral shift-free piezoelectric actuator

Wenjing Liu,, Yiping Zhu,, Jiping Li,, Virendrapal, A S, Yongming Tang,, Baoping Wang,, Huikai Xie,

Year:

2010

Language:

english

File:

PDF, 1.83 MB

english, 2010

43

[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - MEMS mirrors based on curved concentric electrothermal actuators with very small lateral shift and tilt

Liu, Lin, Pal, Sagnik, Xie, Huikai

Year:

2011

Language:

english

File:

PDF, 3.10 MB

english, 2011

44

SPIE Proceedings [SPIE International Symposium on Photoelectronic Detection and Imaging 2011 - Beijing, China (Tuesday 24 May 2011)] International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies - Hybrid zirconium sol-gel thin films with high refractive index

Gorin, Arnaud, Copperwhite, Robert, Elmaghrum, Salem, McDonagh, Colette, Oubaha, Mohamed, Wang, Yuelin, Xie, Huikai, Jin, Yufeng

Year:

2011

Language:

english

File:

PDF, 978 KB

english, 2011

45

Hysteresis Property of Tip-Tilt-Piston Micromirror Based on Tilt-and-Lateral Shift-Free Piezoelectric Unimorph Actuator

Liu, Wenjing, Liao, Wenjun, Jia, Kemiao, Zhu, Yiping, Xie, Huikai, Wang, Baoping, Tang, Yongming

Journal:

Integrated Ferroelectrics

Year:

2014

Language:

english

File:

PDF, 650 KB

english, 2014

46

SPIE Proceedings [SPIE International Symposium on Photoelectronic Detection and Imaging 2011 - Beijing, China (Tuesday 24 May 2011)] International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies - Closed-loop control of a MOEMS mirror integrated with angle sensor

Qian, Rong-rong, Wen, Zhi-yu, Chen, Li, Wen, Zhongquan, Luo, Biao, Wang, Yuelin, Xie, Huikai, Jin, Yufeng

Year:

2011

Language:

english

File:

PDF, 12.76 MB

english, 2011

47

Miniaturizing Fourier Transform Spectrometer With an Electrothermal Micromirror

Wang, Wei, Samuelson, Sean R., Chen, Jiapin, Xie, Huikai

Journal:

IEEE Photonics Technology Letters

Year:

2015

Language:

english

File:

PDF, 1.41 MB

english, 2015

48

Probe alignment and design issues of microelectromechanical system based optical coherence tomography endoscopic imaging

Duan, Can, Sun, Jingjing, Samuelson, Sean, Xie, Huikai

Journal:

Year:

2013

Language:

english

File:

PDF, 1.10 MB

english, 2013

49

Resonant Inductive Coupling-Based Piston Position Sensing Mechanism for Large Vertical Displacement Micromirrors

Tseng, Victor Farm-Guoo, Xie, Huikai

Journal:

Journal of Microelectromechanical Systems

Year:

2016

Language:

english

File:

PDF, 2.23 MB

english, 2016

50

A Compact Fourier Transform Spectrometer on a Silicon Optical Bench With an Electrothermal MEMS Mirror

Wang, Wei, Chen, Jiapin, Zivkovic, Aleksandar S., Tanguy, Quentin A. A., Xie, Huikai

Journal:

Journal of Microelectromechanical Systems

Year:

2016

Language:

english

File:

PDF, 5.23 MB

english, 2016

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